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说明
无说明配置
* Minimum substrate size: 10x10 mm * Computer programmable recipes on hdd * Lens: Olympus 2142: NA = 0.42; Depth of field = 1.2 um for 0.7 um process * Maximum die size: ~15 mm x 15 mm * Resolution: 500 nm over portion of field; 700 nm over entire field * Mask Plates: 5x5x0.090 inches, 5x reduction, typically Soda Lime Glass (Quartz is also acceptable), no pellicle. * Registration tolerance: Max 0.30 um global alignment; Max 0.15 um local alignment (with care, you can achieve < 0.10 um registration)OEM 型号描述
The GCA 6300 DSW steppers have chucks for 3", 100 mm, and 150 mm wafers. Pieces smaller than this can also be used but there is no special chuck for this purpose.文件
无文件
GCA
6300 DWS
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
118004
晶圆尺寸：
未知
年份：
未知
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说明
无说明配置
* Minimum substrate size: 10x10 mm * Computer programmable recipes on hdd * Lens: Olympus 2142: NA = 0.42; Depth of field = 1.2 um for 0.7 um process * Maximum die size: ~15 mm x 15 mm * Resolution: 500 nm over portion of field; 700 nm over entire field * Mask Plates: 5x5x0.090 inches, 5x reduction, typically Soda Lime Glass (Quartz is also acceptable), no pellicle. * Registration tolerance: Max 0.30 um global alignment; Max 0.15 um local alignment (with care, you can achieve < 0.10 um registration)OEM 型号描述
The GCA 6300 DSW steppers have chucks for 3", 100 mm, and 150 mm wafers. Pieces smaller than this can also be used but there is no special chuck for this purpose.文件
无文件