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说明
无说明配置
无配置OEM 型号描述
This Nikon Step-and-Repeat Scanning System is compatible with both 200mm and 300mm process nodes and has a resolution of resolution ≦ 130 nm. When the NSR S205C was originally released in 2000, it boasted the the world's first ultra-high N.A. (0.75) projection lens as well as a KrF excimer laser. The system can process 140+ 200mm wafers/hour (16% higher throughput than Nikon's previous system). Applications for the NSR S205C include mass production of DRAM and MPU.文件
无文件
NIKON
NSR-S205C
类别
Steppers & Scanners
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
108491
晶圆尺寸：
未知
年份：
未知
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说明
无说明配置
无配置OEM 型号描述
This Nikon Step-and-Repeat Scanning System is compatible with both 200mm and 300mm process nodes and has a resolution of resolution ≦ 130 nm. When the NSR S205C was originally released in 2000, it boasted the the world's first ultra-high N.A. (0.75) projection lens as well as a KrF excimer laser. The system can process 140+ 200mm wafers/hour (16% higher throughput than Nikon's previous system). Applications for the NSR S205C include mass production of DRAM and MPU.文件
无文件