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说明
193nm (ArF) Scanner配置
无配置OEM 型号描述
NSR-S308F (resolution ≦ 65 nm). The NSR-308F has a newly developed platform that enables dramatic improvements in alignment accuracy and throughput. Alignment accuracy has been reduced to 8 nm or less, a 44% improvement over Nikon’s previous generation ArF scanner, while throughput was increased to 140 wafers or more per hour for 300 mm wafers, an improvement of approximately 25%. With this significant increase in productivity, the system delivers next-generation process capabilities at a lower overall cost of ownership.文件
无文件
NIKON
NSR-S308F
类别
Steppers & Scanners
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116239
晶圆尺寸：
12"/300mm
年份：
未知
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说明
193nm (ArF) Scanner配置
无配置OEM 型号描述
NSR-S308F (resolution ≦ 65 nm). The NSR-308F has a newly developed platform that enables dramatic improvements in alignment accuracy and throughput. Alignment accuracy has been reduced to 8 nm or less, a 44% improvement over Nikon’s previous generation ArF scanner, while throughput was increased to 140 wafers or more per hour for 300 mm wafers, an improvement of approximately 25%. With this significant increase in productivity, the system delivers next-generation process capabilities at a lower overall cost of ownership.文件
无文件