
说明
FIB配置
Advanced end-point (FIB Assist):28nm Circuit Edit Laser Stage : 50nm accuracy、8” Wafer Optics (IR and FIB) : Backside Circuit Edit Gas Delivery : Tungsten、Bromine、XeF2、Water、Oxgen、TMCTS Working with Copper : Top level copper removal Advanced Imaging and Endpointing CAD : CAD Overlay for Circuit Editing Graphical User Interface : Faster trainingOEM 型号描述
未提供文件
无文件
类别
TEM
上次验证: 17 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
152227
晶圆尺寸:
未知
年份:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
THERMOFISHER SCIENTIFIC / FEI / MICRION
VECTRA 986
类别
TEM
上次验证: 17 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
152227
晶圆尺寸:
未知
年份:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
FIB配置
Advanced end-point (FIB Assist):28nm Circuit Edit Laser Stage : 50nm accuracy、8” Wafer Optics (IR and FIB) : Backside Circuit Edit Gas Delivery : Tungsten、Bromine、XeF2、Water、Oxgen、TMCTS Working with Copper : Top level copper removal Advanced Imaging and Endpointing CAD : CAD Overlay for Circuit Editing Graphical User Interface : Faster trainingOEM 型号描述
未提供文件
无文件