说明
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam Evaporator配置
无配置OEM 型号描述
未提供文件
无文件
类别
Thermal Evaporators
上次验证： 19 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
138625
晶圆尺寸：
4"/100mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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FERROTEC / TEMESCAL
FC 1800
类别
Thermal Evaporators
上次验证： 19 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
138625
晶圆尺寸：
4"/100mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam Evaporator配置
无配置OEM 型号描述
未提供文件
无文件