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说明
无说明配置
Vacuum and Pumping system: 2 x Leybold CV10000CL Cryopumps with COOLVAC SC Controller and Leybold Coolpak6000H compressors 1 x Edwards IGX6000L Dry running rough pump 1 x Meissner trap with Polycold PFC-672HC compressor Electron Beam : EBS500 E-Beam system with 4 pockets crucible consisting of: 1 x EEC500 Beam controller 1 x EHV500 HV transformator 1 x EFS500 Filament power supply 1 x ECS200 Coil power supply Quartz thickness measurement: 1 x QSK1221D Quartz measure head with 12 crystals changer 1 x QCU 500 Quartz control unit 1 x QCO500 Quartz oscillator Substrate capacity: 4 x 6” wafer substrate calotte holder for 5 wafer (2 sets) GUI and Server: HP ProLiant G6 Server Windows Server SP1 Latest Evatec Khan Version for this system installed chamber shielding’s incl main shaper pivot shapers installedOEM 型号描述
未提供文件
无文件
类别
Thermal Evaporators
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
117456
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
BAK 901
类别
Thermal Evaporators
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
117456
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Vacuum and Pumping system: 2 x Leybold CV10000CL Cryopumps with COOLVAC SC Controller and Leybold Coolpak6000H compressors 1 x Edwards IGX6000L Dry running rough pump 1 x Meissner trap with Polycold PFC-672HC compressor Electron Beam : EBS500 E-Beam system with 4 pockets crucible consisting of: 1 x EEC500 Beam controller 1 x EHV500 HV transformator 1 x EFS500 Filament power supply 1 x ECS200 Coil power supply Quartz thickness measurement: 1 x QSK1221D Quartz measure head with 12 crystals changer 1 x QCU 500 Quartz control unit 1 x QCO500 Quartz oscillator Substrate capacity: 4 x 6” wafer substrate calotte holder for 5 wafer (2 sets) GUI and Server: HP ProLiant G6 Server Windows Server SP1 Latest Evatec Khan Version for this system installed chamber shielding’s incl main shaper pivot shapers installedOEM 型号描述
未提供文件
无文件