说明
Thermal Evaporator配置
Denton evaporator (DV-502C) is equipped with cryo-pump and diagnostic apparatus: 14” dia. by 18” high Pyrex bell jar and a stainless steel eight port. Upside down rotary omni substrate holder. Electrical requirement: 208 V, 4 wire, 60 amp with ground and neutral Air requirement: 80 to 120 psi at 8 C.F.M. clean/ dry Water requirement: 7 G.P.M. at 75 to 85F Pumping system: Cryo-pump (CTI 100) and mechanical pump (Alcatel 2008: two- stage, direct drive, 7 C.F.M.) Vacuum gauges (pressure ranged from micron to atmosphere) Gas controller: Brooks Instruments gas flow controller (from 0 to 100 sccm of gas flow) System controller: microprocessor based controller Sources: DVI Minigun and CC-100 Ion Source. The resistance source is a 2 KW source capable of 500 A at 5 V or 200 A at 10 V.OEM 型号描述
未提供文件
无文件
DENTON VACUUM
DV 502C
已验证
类别
Thermal Evaporators
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
21629
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
DV 502C
类别
Thermal Evaporators
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
21629
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Thermal Evaporator配置
Denton evaporator (DV-502C) is equipped with cryo-pump and diagnostic apparatus: 14” dia. by 18” high Pyrex bell jar and a stainless steel eight port. Upside down rotary omni substrate holder. Electrical requirement: 208 V, 4 wire, 60 amp with ground and neutral Air requirement: 80 to 120 psi at 8 C.F.M. clean/ dry Water requirement: 7 G.P.M. at 75 to 85F Pumping system: Cryo-pump (CTI 100) and mechanical pump (Alcatel 2008: two- stage, direct drive, 7 C.F.M.) Vacuum gauges (pressure ranged from micron to atmosphere) Gas controller: Brooks Instruments gas flow controller (from 0 to 100 sccm of gas flow) System controller: microprocessor based controller Sources: DVI Minigun and CC-100 Ion Source. The resistance source is a 2 KW source capable of 500 A at 5 V or 200 A at 10 V.OEM 型号描述
未提供文件
无文件