ei-7
概述
Loaded number / Revolution dome: 44 pc…Φ4 in / 20 pc…Φ6 in SS distance: 900mm Substrate holder: Revolution, Planetary or Satellite can be selected Incident angle (Lift-off): 3.3°…Φ 4 in 4.9°…Φ 6 in
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Loaded number / Revolution dome: 44 pc…Φ4 in / 20 pc…Φ6 in SS distance: 900mm Substrate holder: Revolution, Planetary or Satellite can be selected Incident angle (Lift-off): 3.3°…Φ 4 in 4.9°…Φ 6 in
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