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说明
flatness配置
Working/Deinstall; 300mm Flatness MeasuringOEM 型号描述
AFS 3220, utilize high voltage fast differential charge amplifiers with low noise DAC oscillator, 375 KHz synchronized DC/DC converter power supplies, antialising filter and ADC. The 3220 AFS system is the company's latest in a line of non contact capacitance-based wafer geometry measurement systems.文件
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KLA / ADE
AFS-3220
类别
Thin Film / Film Thickness
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
96815
晶圆尺寸：
未知
年份：
1999
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说明
flatness配置
Working/Deinstall; 300mm Flatness MeasuringOEM 型号描述
AFS 3220, utilize high voltage fast differential charge amplifiers with low noise DAC oscillator, 375 KHz synchronized DC/DC converter power supplies, antialising filter and ADC. The 3220 AFS system is the company's latest in a line of non contact capacitance-based wafer geometry measurement systems.文件
无文件