说明
Nanospec 6100 UV配置
Main Body Configuration Pass/ Fail Head Type / Interface LAH / Special PCB I/F 2 Pass Stage Standard Ver 1.0: X,Y,Z moving ok. Pass Objetives Turret Olympus with 5X, 10X, 15XUV, 40X lens. Pass Loader None N/A Camera / Video capture Pulnix TMC-7N / GV-VCP3R PCI: Video Image is Pass Black dot Centered and clear view. Pass Vis Filter OK Pass Auto Focus Focusing OK. Pass UV / VIS Shutter OK Pass Lamp VIS / UV Pass UV Lamp Power Supply OK Pass Control P.C Motherboard ROBO-8777VG2A Pass Configuration Intel 2.79Ghz, RAM 512MB, HDD 250GB * 2ea Pass Automation Stage Initialization Pass Joystick movement Pass Wafer Chuck Original 8inch and 6inch. Pass Automatic Measurement Pass ETC Missing parts Joystick, Filter cable, Mini printer cable, Pass Input Power 115VAC / 5A / 50,60Hz PassOEM 型号描述
The NanoSpec 6100 is a tabletop film analysis system that provides fast and low-cost measurement capabilities for thin film metrology. It uses non-contact spectroscopic reflectometry to measure sites as small as 10µm in diameter on production wafers and can measure wafer substrates in the size range of 75 to 200mm and photomasks from 5 to 9 inches square. The system can measure film thickness in the range of 200Å - 20µm with the visible light source and 25Å - 20µm with an optional UV light source. The upper thickness range can be extended to 70µm with the thick film option. The system also has a motorized, precision x-y sample stage with a resolution of better than 1µm and a high-resolution color graphics display that provides contour and 3D film thickness mapping.文件
类别
Thin Film / Film Thickness
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142485
晶圆尺寸：
8"/200mm
年份：
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ONTO / NANOMETRICS / ACCENT / BIO-RAD
NANOSPEC 6100
类别
Thin Film / Film Thickness
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142485
晶圆尺寸：
8"/200mm
年份：
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available