说明
无说明配置
Spectral ellipsometer with wavelength range of 245–1000 nm Spot size: 40 × 80 µm Wafer size support: 6-inch and 8-inch wafers Wafer ID for 6-inch wafers: front-side DMC Wafer ID for 8-inch wafers: backside OCR Operating system: Windows 7 Professional SECS/GEM support for host system integration Throughput: 72 wafers per hour for unpatterned wafers (5-point cross, high-throughput mode) Throughput: 63 wafers per hour for patterned wafers (5-point cross, 2-deskew, DMC, high-throughput mode) Short-term (30 dynamic) repeatability: 3σ < 0.3 nm on thin SiO₂ padsOEM 型号描述
未提供文件
无文件
类别
Thin Film / Film Thickness
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142220
晶圆尺寸：
6"/150mm
年份：
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ONTO / NANOMETRICS / ACCENT / BIO-RAD
ATLAS CP+
类别
Thin Film / Film Thickness
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142220
晶圆尺寸：
6"/150mm
年份：
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Spectral ellipsometer with wavelength range of 245–1000 nm Spot size: 40 × 80 µm Wafer size support: 6-inch and 8-inch wafers Wafer ID for 6-inch wafers: front-side DMC Wafer ID for 8-inch wafers: backside OCR Operating system: Windows 7 Professional SECS/GEM support for host system integration Throughput: 72 wafers per hour for unpatterned wafers (5-point cross, high-throughput mode) Throughput: 63 wafers per hour for patterned wafers (5-point cross, 2-deskew, DMC, high-throughput mode) Short-term (30 dynamic) repeatability: 3σ < 0.3 nm on thin SiO₂ padsOEM 型号描述
未提供文件
无文件