说明
Metrology (Bow, Thickness, TTV) SMIF: 2x Brooks Verrsaport 2200 Loadports (Fortrend not supported) SEMI E84 compatible Wafer Handling: GaAs, Si, Sapphire with +/- 200 µm Bow and 4 mm Thickness Different Wafer cassettes (13 / 25 slot) possible Prealigner, OCR Reader CWL 3 mm (Wafer Bow, Wafer Thickness) WLI / CFM OT (Chip Topography) IRT 80 (Film Thickness) FTR UV-VIS-NIR (Thin Film Thickness) MTBF / MTBA / MTTR / Uptime: > 500 h / 50 h / 4 h / > 95 %配置
Wafer Bow, EPI Thickness, TTVOEM 型号描述
未提供文件
FRT
MICROPROF
类别
Thin Film / Film Thickness
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142372
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available