说明
无说明配置
▪TFMS version: V3.31a7 based on DOS ▪Measurement tool : BPR, BPE, VAS BPR - Beam Profile Reflectometry : still the best way to characterize dielectric films BPE - TWI patented Beam Profile Ellipsometer VAS(Visible Spectroscopy) : 470-800 nm ▪SBC boardwithCPU Pentium Ⅲ 600 MHz ▪Cognex 3000 ▪Overhauled all systems and Robot, Controller(ESC200)OEM 型号描述
The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.文件
无文件
类别
Thin Film / Film Thickness
上次验证： 5 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
146823
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / THERMA-WAVE
OP-2600
类别
Thin Film / Film Thickness
上次验证： 5 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
146823
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
▪TFMS version: V3.31a7 based on DOS ▪Measurement tool : BPR, BPE, VAS BPR - Beam Profile Reflectometry : still the best way to characterize dielectric films BPE - TWI patented Beam Profile Ellipsometer VAS(Visible Spectroscopy) : 470-800 nm ▪SBC boardwithCPU Pentium Ⅲ 600 MHz ▪Cognex 3000 ▪Overhauled all systems and Robot, Controller(ESC200)OEM 型号描述
The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.文件
无文件