说明
Film Thickness Masurement配置
无配置OEM 型号描述
The THERMAWAVE OP 5340 metrology system is used for complex thin film thickness measurement on 150mm, 200mm, and 300mm wafers. The THERMAWAVE OP 5340 has 65nm IC Production Accuracy. The THERMAWAVE OP 5340 is capable of directly interfacing with automated material handling systems. OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.文件
无文件
类别
Thin Film / Film Thickness
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137394
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / THERMA-WAVE
OP-5340
类别
Thin Film / Film Thickness
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137394
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Film Thickness Masurement配置
无配置OEM 型号描述
The THERMAWAVE OP 5340 metrology system is used for complex thin film thickness measurement on 150mm, 200mm, and 300mm wafers. The THERMAWAVE OP 5340 has 65nm IC Production Accuracy. The THERMAWAVE OP 5340 is capable of directly interfacing with automated material handling systems. OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.文件
无文件