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说明
Thickness meter No missing parts Current Wafer size : 12配置
无配置OEM 型号描述
the ASET-F5, our third generation spectroscopic ellipsometer, which addresses the difficult film measurement needs that come from the continuing evolution of film development driven by shorter line widths. These new films demand an increasing capability to characterize and control them in production, a capability provided by the ASET-F5.文件
无文件
KLA
ASET-F5
类别
Thin Film / Film Thickness
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
107076
晶圆尺寸：
6"/150mm, 8"/200mm, 12"/300mm
年份：
未知
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说明
Thickness meter No missing parts Current Wafer size : 12配置
无配置OEM 型号描述
the ASET-F5, our third generation spectroscopic ellipsometer, which addresses the difficult film measurement needs that come from the continuing evolution of film development driven by shorter line widths. These new films demand an increasing capability to characterize and control them in production, a capability provided by the ASET-F5.文件
无文件