说明
*.Installed in a clean room and can demonstrate any time.配置
*.Measurement -Speed: 5 sec. for 150mm wafer. -Range: 2x10E7 ~ 4x10E7 dyne/cm2 -RMS Noise: 0.0001 mE-1(radius=10,000 meters) -Resolution:0.00003mE-1(33 kilometers) -Min scan setp: 0.02mm -Max Points Per Scan: 1250 -Min Radius: 2.0m(for 80mm scan length) -Temperature Range: room temperature ~ 500 C *.Light Source: 670nm(3mW), 750nm(3mW) Laser. *.Dimension: 46cm(18")x46cm(18")x56cm(22") plus computer. *.Weight: 45.5Kg *.Utility -Operation temperature: 18~22 C(64~72F) -Gas Connection: Cooling gas(Nitrogen, Class 100 Air) -Power: 115V, 11A, 50/60Hz -Computer: Pentium 200Mhz,32MB RAM, 3GB HDD, 17" LCD Monitor.OEM 型号描述
The Tencor FLX-2320 is an equipment that accurately measures film stress at temperatures from -65°C to 500°C, using dual wavelength technology to work on all types of films, including transparent ones like silicon nitride. This helps better understand film properties in simulated process environments.文件
无文件
KLA
FLX 2320
已验证
类别
Thin Film / Film Thickness
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
66000
晶圆尺寸：
6"/150mm
年份：
1993
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
FLX 2320
类别
Thin Film / Film Thickness
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
66000
晶圆尺寸：
6"/150mm
年份：
1993
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
*.Installed in a clean room and can demonstrate any time.配置
*.Measurement -Speed: 5 sec. for 150mm wafer. -Range: 2x10E7 ~ 4x10E7 dyne/cm2 -RMS Noise: 0.0001 mE-1(radius=10,000 meters) -Resolution:0.00003mE-1(33 kilometers) -Min scan setp: 0.02mm -Max Points Per Scan: 1250 -Min Radius: 2.0m(for 80mm scan length) -Temperature Range: room temperature ~ 500 C *.Light Source: 670nm(3mW), 750nm(3mW) Laser. *.Dimension: 46cm(18")x46cm(18")x56cm(22") plus computer. *.Weight: 45.5Kg *.Utility -Operation temperature: 18~22 C(64~72F) -Gas Connection: Cooling gas(Nitrogen, Class 100 Air) -Power: 115V, 11A, 50/60Hz -Computer: Pentium 200Mhz,32MB RAM, 3GB HDD, 17" LCD Monitor.OEM 型号描述
The Tencor FLX-2320 is an equipment that accurately measures film stress at temperatures from -65°C to 500°C, using dual wavelength technology to work on all types of films, including transparent ones like silicon nitride. This helps better understand film properties in simulated process environments.文件
无文件