
说明
Provides precise, non-destructive thin film stress measurement via substrate curvature analysis, supporting process control, failure analysis, and R&D applications. Configured for wafer-based measurements with support for sizes up to approximately 200mm. Power: 115V / 1 Phase / 60Hz配置
无配置OEM 型号描述
未提供文件
无文件
KLA
FLX 2320A
类别
Thin Film / Film Thickness
上次验证: 15 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
146114
晶圆尺寸:
8"/200mm
年份:
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Provides precise, non-destructive thin film stress measurement via substrate curvature analysis, supporting process control, failure analysis, and R&D applications. Configured for wafer-based measurements with support for sizes up to approximately 200mm. Power: 115V / 1 Phase / 60Hz配置
无配置OEM 型号描述
未提供文件
无文件