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说明
The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.配置
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. Spotsize: R = 50um, T < 400um with manual loading. The n&k 1700-RT is designed for handling 5” or 6” square masks.OEM 型号描述
未提供文件
无文件
N & K
1700RT
类别
Thin Film / Film Thickness
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
66004
晶圆尺寸：
未知
年份：
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.配置
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. Spotsize: R = 50um, T < 400um with manual loading. The n&k 1700-RT is designed for handling 5” or 6” square masks.OEM 型号描述
未提供文件
无文件