说明
无说明配置
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 型号描述
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.文件
无文件
ASYST
SPARTAN
已验证
类别
Wafer Handling
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
60881
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASYST
SPARTAN
类别
Wafer Handling
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
60881
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 型号描述
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.文件
无文件