说明
无说明配置
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 型号描述
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.文件
无文件
ASYST
SPARTAN
已验证
类别
Wafer Handling
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
60881
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASYST
SPARTAN
类别
Wafer Handling
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
60881
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 型号描述
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.文件
无文件