说明
Equipment front-end module配置
(Qty 2) Load ports Brooks robot part number: 121655 FIXLOAD 6" FabExpress Brooks robot controller part number: 105947 P/N: 701-0401-01ROEM 型号描述
The Brooks Automation 109752-199 is the model designation for a 300mm Equipment Front End Module (EFEM), specifically utilized in the FabExpress family of atmospheric wafer transfer and cabinet automation systems.文件
无文件
类别
Wafer Handling
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153153
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BROOKS / PRI AUTOMATION
109752-199
类别
Wafer Handling
上次验证： 4 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153153
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Equipment front-end module配置
(Qty 2) Load ports Brooks robot part number: 121655 FIXLOAD 6" FabExpress Brooks robot controller part number: 105947 P/N: 701-0401-01ROEM 型号描述
The Brooks Automation 109752-199 is the model designation for a 300mm Equipment Front End Module (EFEM), specifically utilized in the FabExpress family of atmospheric wafer transfer and cabinet automation systems.文件
无文件