
说明
Purpose: Vapor MEMS Release -Use for silicon sacrificial layer removal (Etching) -Single wafer process in vacuum chamber -Process Temperature can be 5oC to >100oC配置
Chemicals: HF Process type: Single wafer Pumping system: -Ebara AA200WN*2 -Ebara AA40WN*2 (1 for service and 1 for spare) Local Scrubber: Kanken Techno KW300OEM 型号描述
未提供文件
无文件
类别
Wafer Handling
上次验证: 2 天前
物品主要详细信息
状况:
New
运行状况:
未知
产品编号:
147939
晶圆尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
memsstar
Orbis 3000
类别
Wafer Handling
上次验证: 2 天前
物品主要详细信息
状况:
New
运行状况:
未知
产品编号:
147939
晶圆尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Purpose: Vapor MEMS Release -Use for silicon sacrificial layer removal (Etching) -Single wafer process in vacuum chamber -Process Temperature can be 5oC to >100oC配置
Chemicals: HF Process type: Single wafer Pumping system: -Ebara AA200WN*2 -Ebara AA40WN*2 (1 for service and 1 for spare) Local Scrubber: Kanken Techno KW300OEM 型号描述
未提供文件
无文件