说明
Multi-Process CMP配置
Standard Features Include: - Automated control with soft touch key pad - Two platen process for post polish buff - Multiple slurry dispense - In-situ pad conditioner - Material compatibility for medium and low ph slurries (1 – 12) - Down force up to 750lbs. - Controllable wafer back pressure - Polish head clean station - External interface for end point capability Optional Features - Multizone ViPRR carrier upgrade - Temperature controlled platens - SECS II InterfaceOEM 型号描述
未提供文件
无文件
IPEC / WESTECH
AVANTI 372M
已验证
类别
Wafer Polishing
上次验证： 29 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
83267
晶圆尺寸：
8"/200mm
年份：
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
IPEC / WESTECH
AVANTI 372M
类别
Wafer Polishing
上次验证： 29 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
83267
晶圆尺寸：
8"/200mm
年份：
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Multi-Process CMP配置
Standard Features Include: - Automated control with soft touch key pad - Two platen process for post polish buff - Multiple slurry dispense - In-situ pad conditioner - Material compatibility for medium and low ph slurries (1 – 12) - Down force up to 750lbs. - Controllable wafer back pressure - Polish head clean station - External interface for end point capability Optional Features - Multizone ViPRR carrier upgrade - Temperature controlled platens - SECS II InterfaceOEM 型号描述
未提供文件
无文件