说明
无说明配置
-Fully automated, dry-in/dry-out single wafer SiC substrate polisher -Configured for 150mm wafer processing -Milara, edge-contact dry robot on linear transfer platform -3 polish modules equipped with dedicated hardware -22" polish tables for constant-flow polish process -High pressure spray bar pad cleaner -Overam spindle with 4 passage rotary union -Slurry flow-controller for 2 lines per table -Integrated spray clean module with Jetspray and 2 fluid lines -Wet wafer transfer module with edge grip wafer flip robot to return wafer orientation to polish side up for cleaning -PEER Group, Windows based software architecture on a Beckhoff PLC control system with wafer lot and slot integrity -Semi S2, S8 and CE certification -Table temperture control unit -Universal Vacuum System -OCR camera -200mm wafer size conversion kit -6EZ Spare Parts KitOEM 型号描述
未提供文件
无文件
REVASUM
6EZ
已验证
类别
Wafer Polishing
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
108406
晶圆尺寸：
未知
年份：
2020
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
REVASUM
6EZ
类别
Wafer Polishing
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
108406
晶圆尺寸：
未知
年份：
2020
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
-Fully automated, dry-in/dry-out single wafer SiC substrate polisher -Configured for 150mm wafer processing -Milara, edge-contact dry robot on linear transfer platform -3 polish modules equipped with dedicated hardware -22" polish tables for constant-flow polish process -High pressure spray bar pad cleaner -Overam spindle with 4 passage rotary union -Slurry flow-controller for 2 lines per table -Integrated spray clean module with Jetspray and 2 fluid lines -Wet wafer transfer module with edge grip wafer flip robot to return wafer orientation to polish side up for cleaning -PEER Group, Windows based software architecture on a Beckhoff PLC control system with wafer lot and slot integrity -Semi S2, S8 and CE certification -Table temperture control unit -Universal Vacuum System -OCR camera -200mm wafer size conversion kit -6EZ Spare Parts KitOEM 型号描述
未提供文件
无文件