说明
Wafer Scrubber配置
Process: SCRUB Software Version: 6.00.26.2 System Power Rating: 208 AC 3-Phase Loading Configuration: 4 Load PortsOEM 型号描述
The features of the NS300+ HT process module - renowned for its reliability and stability - have been carried on into the new NS300Z, a more productive scrubber. The system has an 8-process spin chamber and achieves a throughput of up to 1,000 wafers per hour (200% of the previous system). Unique function is also equipped to realize the prevention of contamination during wafer transport, while keeping high productivity. In addition, the Atomized Spray 2 (AS2) and brushes succeeding from the previous system was improved. The NS300Z provides a wide range of scrubber clean process with high productivity even in cutting-edge device manufacturing.文件
无文件
TEL / TOKYO ELECTRON
NS300Z
已验证
类别
Wafer Scrubber
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
33423
晶圆尺寸：
12"/300mm
年份：
2016
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
NS300Z
类别
Wafer Scrubber
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
33423
晶圆尺寸：
12"/300mm
年份：
2016
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Wafer Scrubber配置
Process: SCRUB Software Version: 6.00.26.2 System Power Rating: 208 AC 3-Phase Loading Configuration: 4 Load PortsOEM 型号描述
The features of the NS300+ HT process module - renowned for its reliability and stability - have been carried on into the new NS300Z, a more productive scrubber. The system has an 8-process spin chamber and achieves a throughput of up to 1,000 wafers per hour (200% of the previous system). Unique function is also equipped to realize the prevention of contamination during wafer transport, while keeping high productivity. In addition, the Atomized Spray 2 (AS2) and brushes succeeding from the previous system was improved. The NS300Z provides a wide range of scrubber clean process with high productivity even in cutting-edge device manufacturing.文件
无文件