说明
Post CMP Scrubber配置
Dual brush and top side brush chambers, spin dry Missing parts: HLS cards-> Shutdown during inspection Gas - 1:100 DHF PROGRESS TYPE: WET/ CMP COMPONENT : SERVOPACK SGD-02BH MX-7500 TBC BRUSH LOAD CELL AMP PRE-TECH FINEJET GENERATOR 0.750KVA TRANSFOMER FA-21000A PC HFC-VWE HITACHI INVERTER HF CIRCULATION FILTEROEM 型号描述
The new post-CMP cleaner improves throughput by 50% by reducing wafer transfer and drying time. Footprint is also reduced by optimally arranging each processing unit. Moreover, inline configuration with chemical mechanical polisher is also possible.文件
无文件
类别
Wet Benches - Auto
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
119531
晶圆尺寸：
8"/200mm
年份：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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AS-2000
类别
Wet Benches - Auto
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
119531
晶圆尺寸：
8"/200mm
年份：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Post CMP Scrubber配置
Dual brush and top side brush chambers, spin dry Missing parts: HLS cards-> Shutdown during inspection Gas - 1:100 DHF PROGRESS TYPE: WET/ CMP COMPONENT : SERVOPACK SGD-02BH MX-7500 TBC BRUSH LOAD CELL AMP PRE-TECH FINEJET GENERATOR 0.750KVA TRANSFOMER FA-21000A PC HFC-VWE HITACHI INVERTER HF CIRCULATION FILTEROEM 型号描述
The new post-CMP cleaner improves throughput by 50% by reducing wafer transfer and drying time. Footprint is also reduced by optimally arranging each processing unit. Moreover, inline configuration with chemical mechanical polisher is also possible.文件
无文件