概述

The DV-24BF is a four-chamber system from the Da Vinci Series by SEZ, designed for high-volume manufacturing applications. It performs etch and clean, polymer removal, decontamination, and other back-and frontside processes on 200 mm wafers. The tool is optimized for emerging technologies such as high-k dielectrics, new metal gates, and non-volatile memory devices. It offers optimized process performance, high throughput, minimized footprint, advanced handling, reduced media consumption, flexible chemistry application, and higher reliability, resulting in low CoO.