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说明
Condition: Complete / Working Status: Installed in the fab配置
无配置OEM 型号描述
Introduced to the market during fiscal 2002, the Sirius was designed specifically to deliver HydrOzone process. HydrOzone, using a minimal amount of deionized water and ozone is a low cost process option in comparison to the typical processes used for photoresist stripping, photolithography rework and organic cleans. The Sirius is a manually loaded semi-automated system with a 50 wafer capacity spray processing chamber. The system is available to accommodate either 200mm or 300mm wafer sizes.文件
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SEMITOOL
SIRIUS
已验证
类别
Wet Processing / Wafer Cleaning
上次验证: 23 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
106396
晶圆尺寸:
未知
年份:
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部SEMITOOL
SIRIUS
类别
Wet Processing / Wafer Cleaning
上次验证: 23 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
106396
晶圆尺寸:
未知
年份:
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Condition: Complete / Working Status: Installed in the fab配置
无配置OEM 型号描述
Introduced to the market during fiscal 2002, the Sirius was designed specifically to deliver HydrOzone process. HydrOzone, using a minimal amount of deionized water and ozone is a low cost process option in comparison to the typical processes used for photoresist stripping, photolithography rework and organic cleans. The Sirius is a manually loaded semi-automated system with a 50 wafer capacity spray processing chamber. The system is available to accommodate either 200mm or 300mm wafer sizes.文件
无文件