说明
The Gasonics L3510 plasma system is designed for ashing and cleaning semiconductor wafers. The Gasonics L3510 does this by creating monatomic oxygen the active specie, which chemically reacts with the photoresist on the surface of the wafer. The Gasonics L3510 system is composed of two main components: (1) The Process Sub-System The process sub-system includes the controller, microwave generator, gas flow control, cassette platform, and robot assembly. (2) The Vacuum Pump The vacuum pump is normally located in an adjacent equipment room separate from the main system. The pump should run continuously.配置
无配置OEM 型号描述
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.文件
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LAM RESEARCH / NOVELLUS / GASONICS
L3510
已验证
类别
Ashers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
83989
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS / GASONICS
L3510
类别
Ashers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
83989
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
The Gasonics L3510 plasma system is designed for ashing and cleaning semiconductor wafers. The Gasonics L3510 does this by creating monatomic oxygen the active specie, which chemically reacts with the photoresist on the surface of the wafer. The Gasonics L3510 system is composed of two main components: (1) The Process Sub-System The process sub-system includes the controller, microwave generator, gas flow control, cassette platform, and robot assembly. (2) The Vacuum Pump The vacuum pump is normally located in an adjacent equipment room separate from the main system. The pump should run continuously.配置
无配置OEM 型号描述
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.文件
无文件