说明
Working condition配置
Model : CG 4000 Condition : Initialize tested, Option : Dry Pump Futures and configurations Wafer size : 300mm, "V" notch type Number of Cassette : TAS-300-E4, 2 port Foup type Robot type : Tazmo robot Mini environment Load lock : 2 Port load lock chamber Stage : Moving renge X=0 to 360, Y= -5 to 300mm by stepping motor Stage position : Laser doppler effect type Image Resolution : 1.8nm(at 800V) Accelerating voltage : 300V to 1600V Electron optic system : Retarding + boosting method CD Measurement range : 50 nm ~ 2 um Measure repeatability : 1% or 0,3 nm Throughput : 30 wafer/hour, 20point/wafer OS version : Red Hat Linux SEM Version: Ver 31.01 or higher. EWS : HITACHI HFW-2000 FA-PC with LCD type monitor Chiller : ITACHI W5010T Dimension : Main body : 1200(W) x 2007(D) x 1900(H) Weight 2050Kg Display unit : 600(W) x 1496(D) x 1850(H) Weight 340Kg Mini environment :1200(W) x 1200(D) x 1850(H) Weight 730Kg Power unit : 535(W) x 1170(D) x 1800(H) Weight 380Kg Chiller : 400(W) x 450(D) x 660(H) Weight 50Kg Roughing pump 2set (Option) : 220(W) x 750(D) x 570(H) Weight 100Kg Requirements Power & Utility for Main body : AC 220V single phase 6KVA within (less then 100 Ohm) ground line N2 : 500~680kPa (connecting pipe out diameter 6mm) House Vacuum : -80 Pa (connecting pipe out diameter 8mm) PDA(Pressure Dry Air) : 600~880 kPa (connecting pipe out diameter 6mm) Requirements Power & Utility for Dry pump : PCW : 1~1.5 liter/min Pressure : 2~5 kg/cm3 x 2 set for Dry pump N2 : 500~680kPa (connecting pipe out diameter 6mm) 2 set Exhaust : Normal heat exhaust NW 50 2 set VACUUM, Stage initialize, Gun HV condition --> Good Robot initialize completedOEM 型号描述
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.文件
HITACHI
CG4000
已验证
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
107208
晶圆尺寸：
12"/300mm
年份：
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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HITACHI
CG4000
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
107208
晶圆尺寸：
12"/300mm
年份：
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available