说明
SEM - Critical Dimension (CD) Measurement配置
• * Ergonomics Modification • * 3 FOUP • * V35 Software • Signal Light Tower (with buzzer) • UL Safety Modification (S2-0200) • Circulator Input Voltage Modification • Automatic Beam Alignment on wafer • Optical magnification (x100 & x200) • AC208V input modification • Cable (15m) (for main unit thru power supply unit) • SE-Gun back-up power supply unit • Ion pump back-up power supply unit • SPM (pre-focus only) • Multi-point Measurement • Gap meas • Corner radius meas • Image Filing Function • Output function to DOS format FD • Recipe queue • ArF package (multi) • Image info additional function to MSR file • Waveform matching • Large pixel • Ax+B • Image enhancement • Mag. Max x400k • Dry Pump I/F "F" (for IL70) • GEM300 • DS/T-PC link connection license • 100nm Microscale • Grounded Arm • FFU hood • Flat Scan • N2 PurgeOEM 型号描述
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.文件
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HITACHI
CG4000
已验证
类别
CD-SEM
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
83143
晶圆尺寸:
12"/300mm
年份:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CG4000
已验证
类别
CD-SEM
上次验证: 27 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
83143
晶圆尺寸:
12"/300mm
年份:
2009
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
SEM - Critical Dimension (CD) Measurement配置
• * Ergonomics Modification • * 3 FOUP • * V35 Software • Signal Light Tower (with buzzer) • UL Safety Modification (S2-0200) • Circulator Input Voltage Modification • Automatic Beam Alignment on wafer • Optical magnification (x100 & x200) • AC208V input modification • Cable (15m) (for main unit thru power supply unit) • SE-Gun back-up power supply unit • Ion pump back-up power supply unit • SPM (pre-focus only) • Multi-point Measurement • Gap meas • Corner radius meas • Image Filing Function • Output function to DOS format FD • Recipe queue • ArF package (multi) • Image info additional function to MSR file • Waveform matching • Large pixel • Ax+B • Image enhancement • Mag. Max x400k • Dry Pump I/F "F" (for IL70) • GEM300 • DS/T-PC link connection license • 100nm Microscale • Grounded Arm • FFU hood • Flat Scan • N2 PurgeOEM 型号描述
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.文件
无文件