说明
无说明配置
Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEM 型号描述
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8文件
无文件
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HITACHI
S-8820
类别
CD-SEM
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
133570
晶圆尺寸：
未知
年份：
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Robot: MECS Modell: UTC820Z Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm) SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system Voltage: 700-1300V CCD Camera: optical field of view 1.2 x 1.2mm. black/white image SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03 OS: HP-UX Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mappingOEM 型号描述
20 (automatic operation) (6-inch wafer, 5-point measurement) wafer sizes: 5, 6, 8文件
无文件