说明
Software Version: NA CIM: GEM Process: CD MEASUREMENT配置
CDSEM Hardware Configuration System Type Description Quantity Status Main System Main tool 1 OK Options System Optic system OK Others OK Factory Interface SMIF 2 OK Handler System Robot system 1 OKOEM 型号描述
The Hitachi S-9220 CD-SEM is a high-resolution, automated tool for precise CD measurements. It is designed for inline process control and development in semiconductor manufacturing. With programmable addressing and pattern recognition, it accurately measures various structures. It supports 6-inch and 8-inch wafer loading and provides easy data access via Hitachi software and a Data Station. The S-9220 CD-SEM is an essential tool for semiconductor manufacturers, offering superior resolution and automation for reliable CD measurements.文件
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HITACHI
S-9220
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
133417
晶圆尺寸：
8"/200mm
年份：
2020
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available