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说明
CD-SEM配置
无配置OEM 型号描述
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.文件
无文件
HITACHI
S-9260A
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
13980
晶圆尺寸：
8"/200mm
年份：
2003
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说明
CD-SEM配置
无配置OEM 型号描述
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.文件
无文件