说明
CD-SEM配置
无配置OEM 型号描述
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.文件
无文件
HITACHI
S-9260A
已验证
类别
CD-SEM
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
13980
晶圆尺寸:
8"/200mm
年份:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HITACHI
S-9260A
类别
CD-SEM
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
13980
晶圆尺寸:
8"/200mm
年份:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
CD-SEM配置
无配置OEM 型号描述
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.文件
无文件