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说明
Electron Microscope Measuring Instruments配置
无配置OEM 型号描述
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.文件
无文件
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HITACHI
S-9300
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
115158
晶圆尺寸：
8"/200mm
年份：
2008
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说明
Electron Microscope Measuring Instruments配置
无配置OEM 型号描述
The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.文件
无文件