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EVAPORATION配置
无配置OEM 型号描述
Hitachi High-Technologies Corporation has launched DESIGNGAUGE, a mask design data measuring system aimed at improving efficiency and production yield in semiconductor device design and development. DESIGNGAUGE accurately collates and compares mask pattern design data with circuit pattern image data on the wafer, obtained through a critical dimension scanning electron microscope (CD-SEM). It enables the creation of measurement recipes offline that were previously only possible with a CD-SEM, allowing remote control of the CD-SEM to automatically align mask pattern design data with the wafer's test pattern. This significantly streamlines the data acquisition process for creating an optical proximity correction (OPC) model, reducing the time required compared to conventional techniques. Hitachi High-Tech is committed to further enhancing the accuracy and capabilities of DESIGNGAUGE and developing DFM-based measuring technologies to meet evolving metrology needs.文件
无文件
HITACHI
S-9380 II
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
38558
晶圆尺寸：
6"/150mm
年份：
未知
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说明
EVAPORATION配置
无配置OEM 型号描述
Hitachi High-Technologies Corporation has launched DESIGNGAUGE, a mask design data measuring system aimed at improving efficiency and production yield in semiconductor device design and development. DESIGNGAUGE accurately collates and compares mask pattern design data with circuit pattern image data on the wafer, obtained through a critical dimension scanning electron microscope (CD-SEM). It enables the creation of measurement recipes offline that were previously only possible with a CD-SEM, allowing remote control of the CD-SEM to automatically align mask pattern design data with the wafer's test pattern. This significantly streamlines the data acquisition process for creating an optical proximity correction (OPC) model, reducing the time required compared to conventional techniques. Hitachi High-Tech is committed to further enhancing the accuracy and capabilities of DESIGNGAUGE and developing DFM-based measuring technologies to meet evolving metrology needs.文件
无文件