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说明
无说明配置
无配置OEM 型号描述
The S-9380 is Hitachi’s most advanced CD-measurement SEM developed for 65 nm process control of semiconductor devices on wafers up to 300 mm in diameter. With improvement in both hardware and software, the S-9380 supports a high throughput of 33 wafers per hour with 20 measurement points per wafer, and resolution of 2.0 nm.文件
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HITACHI
S-9380
类别
CD-SEM
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
96504
晶圆尺寸：
未知
年份：
2009
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说明
无说明配置
无配置OEM 型号描述
The S-9380 is Hitachi’s most advanced CD-measurement SEM developed for 65 nm process control of semiconductor devices on wafers up to 300 mm in diameter. With improvement in both hardware and software, the S-9380 supports a high throughput of 33 wafers per hour with 20 measurement points per wafer, and resolution of 2.0 nm.文件
无文件