说明
无说明配置
Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
无文件
EBARA
F-REX300
已验证
类别
CMP
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
105057
晶圆尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部EBARA
F-REX300
类别
CMP
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
105057
晶圆尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
无文件