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说明
CMP配置
2 chamberOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
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EBARA
F-REX300
类别
CMP
上次验证： 21 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123630
晶圆尺寸：
未知
年份：
未知
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说明
CMP配置
2 chamberOEM 型号描述
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文件
无文件