说明
Semi Automatic, with Manual loading配置
Wafer diameter: . up to 8 inch (with proper chucks and pre-aligner) . used up to 6 inchOEM 型号描述
EVG 101 Advanced Resist Processing System The EVG101 resist processing system performs R&D-type processes on a single chamber design, which is fully compatible with EVG’s automated systems. The EVG101 supports wafers up to 300 mm and can be configured for spin or spray coating and developing. Conformal layers of photoresist or polymers are achieved on 3D structured wafers for interconnection techniques with EVG’s advanced OmniSpray coating technology. This ensures low material consumption of precious high-viscosity photoresists or polymers while improving uniformity and resist spreading options.文件
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EVGroup (EVG)
EVG101
已验证
类别
Coaters & Developers
上次验证： 26 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
108869
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVGroup (EVG)
EVG101
类别
Coaters & Developers
上次验证： 26 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
108869
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Semi Automatic, with Manual loading配置
Wafer diameter: . up to 8 inch (with proper chucks and pre-aligner) . used up to 6 inchOEM 型号描述
EVG 101 Advanced Resist Processing System The EVG101 resist processing system performs R&D-type processes on a single chamber design, which is fully compatible with EVG’s automated systems. The EVG101 supports wafers up to 300 mm and can be configured for spin or spray coating and developing. Conformal layers of photoresist or polymers are achieved on 3D structured wafers for interconnection techniques with EVG’s advanced OmniSpray coating technology. This ensures low material consumption of precious high-viscosity photoresists or polymers while improving uniformity and resist spreading options.文件
无文件