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说明
SUSS ACS200 Classic (Gen 1) Has the coater/developer/hot & cold plate stacks配置
- Model: 200AA129 - Module 1: Spinner Module - Module 2: HCV - Module 3: Solvent Developer Module - Module 4: HCV - Thermo Scientific A25 Chiller - Neslab RTE-221 ChillerOEM 型号描述
The KARL SUSS ACS 200 is a fully automatic coater/developer system for 200mm wafers. KARL SUSS ACS 200 include HVM and R&D in Advanced Packaging, MEMS and LED. Now on its 3rd generation, the KARL SUSS ACS 200 has the highest process module count of any 200 mm coater / developer on the market. Automated equipment insures that all process steps are completed in a systematic, reproducible manner without variation inherent with manual operations. The Suss system may be configured with two or more coating systems, up to six hot plate units and an aqueous developer system. Substrates of many sizes, shapes may be processed simultaneously through any desired series of process steps or recipe.文件
无文件
类别
Coaters & Developers
上次验证： 24 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123239
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SUSS MicroTec / KARL SUSS
ACS200
类别
Coaters & Developers
上次验证： 24 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123239
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
SUSS ACS200 Classic (Gen 1) Has the coater/developer/hot & cold plate stacks配置
- Model: 200AA129 - Module 1: Spinner Module - Module 2: HCV - Module 3: Solvent Developer Module - Module 4: HCV - Thermo Scientific A25 Chiller - Neslab RTE-221 ChillerOEM 型号描述
The KARL SUSS ACS 200 is a fully automatic coater/developer system for 200mm wafers. KARL SUSS ACS 200 include HVM and R&D in Advanced Packaging, MEMS and LED. Now on its 3rd generation, the KARL SUSS ACS 200 has the highest process module count of any 200 mm coater / developer on the market. Automated equipment insures that all process steps are completed in a systematic, reproducible manner without variation inherent with manual operations. The Suss system may be configured with two or more coating systems, up to six hot plate units and an aqueous developer system. Substrates of many sizes, shapes may be processed simultaneously through any desired series of process steps or recipe.文件
无文件