说明
Wafer Backside Rinse Wafer Handling: Standard Robot Mini-Environment Cassette to cassette Accessories: MAXIPEC-3000 Air conditioning and filtration unit specifically designed for Falcon system providing class 10 environment.配置
Number of Photoresist Develop Stations 1 Number of Photoresist Dispenses 2 Number of Vapor Prime Hot Plates 1 Number of Hot Plates 5 Number of Chill Plates 4 Number of Cassette Elevators 2 System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.OEM 型号描述
The KARL SUSS ACS 200 is a fully automatic coater/developer system for 200mm wafers. KARL SUSS ACS 200 include HVM and R&D in Advanced Packaging, MEMS and LED. Now on its 3rd generation, the KARL SUSS ACS 200 has the highest process module count of any 200 mm coater / developer on the market. Automated equipment insures that all process steps are completed in a systematic, reproducible manner without variation inherent with manual operations. The Suss system may be configured with two or more coating systems, up to six hot plate units and an aqueous developer system. Substrates of many sizes, shapes may be processed simultaneously through any desired series of process steps or recipe.文件
无文件
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123219
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SUSS MicroTec / KARL SUSS
ACS200
类别
Coaters & Developers
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123219
晶圆尺寸：
8"/200mm
年份：
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Wafer Backside Rinse Wafer Handling: Standard Robot Mini-Environment Cassette to cassette Accessories: MAXIPEC-3000 Air conditioning and filtration unit specifically designed for Falcon system providing class 10 environment.配置
Number of Photoresist Develop Stations 1 Number of Photoresist Dispenses 2 Number of Vapor Prime Hot Plates 1 Number of Hot Plates 5 Number of Chill Plates 4 Number of Cassette Elevators 2 System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.OEM 型号描述
The KARL SUSS ACS 200 is a fully automatic coater/developer system for 200mm wafers. KARL SUSS ACS 200 include HVM and R&D in Advanced Packaging, MEMS and LED. Now on its 3rd generation, the KARL SUSS ACS 200 has the highest process module count of any 200 mm coater / developer on the market. Automated equipment insures that all process steps are completed in a systematic, reproducible manner without variation inherent with manual operations. The Suss system may be configured with two or more coating systems, up to six hot plate units and an aqueous developer system. Substrates of many sizes, shapes may be processed simultaneously through any desired series of process steps or recipe.文件
无文件