说明
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafers配置
-Cu, TA , Etcher -Missing pumpOEM 型号描述
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.文件
无文件
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
已验证
类别
CVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
66181
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
类别
CVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
66181
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
-System is powered by Inova pvd e-chuck power supply. -Brooks automation magnatran 7 -2 sets of cti cryocenics -VAT vacuum valves -PVD CU and PVD TA for wafers配置
-Cu, TA , Etcher -Missing pumpOEM 型号描述
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.文件
无文件