We value your privacy
We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. 阅读更多
说明
无说明配置
3 PMs (8" Convertible) Robot : Brooks Metal PVD deposition Process (Product ): Sputtering Process Modules Configuration 1. Cassette Load Lock Modules -Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, -Leybold TMP/NT 150/360V/H turbo pump 2. Desorb Modules For wafers orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump 3. Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. 4. PVDCathode -AE MDX Magatron DrivePower Supply . -CTI cryo on board 8 and 8300 compressor. -VAT Gate valve series 14 -AlCu target 14” diameter 5. PVD Cathode Same as 4. TaAl target 14” diameterOEM 型号描述
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.文件
无文件
类别
CVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
63716
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
类别
CVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
63716
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
3 PMs (8" Convertible) Robot : Brooks Metal PVD deposition Process (Product ): Sputtering Process Modules Configuration 1. Cassette Load Lock Modules -Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, -Leybold TMP/NT 150/360V/H turbo pump 2. Desorb Modules For wafers orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump 3. Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. 4. PVDCathode -AE MDX Magatron DrivePower Supply . -CTI cryo on board 8 and 8300 compressor. -VAT Gate valve series 14 -AlCu target 14” diameter 5. PVD Cathode Same as 4. TaAl target 14” diameterOEM 型号描述
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.文件
无文件