跳至主要内容
We value your privacy

We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. 阅读更多

Moov logo

Moov Icon
KLA SURFSCAN 6420
  • KLA SURFSCAN 6420
  • KLA SURFSCAN 6420
说明
System dimensions (cm): 80x85 x188 Weight : 330 Kg
配置
-Capable of 4"-8" wafers. -Non-patterned surface Inspection System. -0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards. -0.02 ppm Haze Sensitivity. -Waves Length 488 nm, 30mw ArLaser, Blue Laser , Spot Size 90µ; -Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ; -Throughput 120/6" wph -Single puck handling from single cassette or platform -Win 98 software, CD ROM Writer software version: 4. 2 -XY coordinates, GEM SECS: options available
OEM 型号描述
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.
文件

无文件

类别
Defect Inspection

上次验证: 60 多天前

物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

113497


晶圆尺寸:

4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm


年份:

1996


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

KLA

SURFSCAN 6420

verified-listing-icon
已验证
类别
Defect Inspection
上次验证: 60 多天前
listing-photo-09d2d6ca351f4c64a26fe08d43f09e86-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/30409/09d2d6ca351f4c64a26fe08d43f09e86/8064d688cc5141daa2ee5e049d8313a9_ce1e7f7ec5e14306972c9cab8dd7bd4e_mw.jpeg
listing-photo-09d2d6ca351f4c64a26fe08d43f09e86-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/30409/09d2d6ca351f4c64a26fe08d43f09e86/5834694674d04bb7843556e279f2e105_b0704126357945af8251ab37746679011201a_mw.jpeg
物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

113497


晶圆尺寸:

4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm


年份:

1996


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
System dimensions (cm): 80x85 x188 Weight : 330 Kg
配置
-Capable of 4"-8" wafers. -Non-patterned surface Inspection System. -0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards. -0.02 ppm Haze Sensitivity. -Waves Length 488 nm, 30mw ArLaser, Blue Laser , Spot Size 90µ; -Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ; -Throughput 120/6" wph -Single puck handling from single cassette or platform -Win 98 software, CD ROM Writer software version: 4. 2 -XY coordinates, GEM SECS: options available
OEM 型号描述
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.
文件

无文件