说明
De-installed配置
-Electric source: 208V/1Ph/16A -Non-patterned wafer film surface analyzer -One automatic wafer handler -Defect map and histogram with zoom -2D signal integration -Non-contaminating robotic handler -X-Y Coordinates Software -Random access sender/receiver unitOEM 型号描述
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.文件
KLA
SURFSCAN 6420
已验证
类别
Defect Inspection
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
102947
晶圆尺寸：
6"/150mm
年份：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN 6420
已验证
类别
Defect Inspection
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
102947
晶圆尺寸：
6"/150mm
年份：
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available