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KLA SURFSCAN 6420
  • KLA SURFSCAN 6420
  • KLA SURFSCAN 6420
  • KLA SURFSCAN 6420
说明
De-installed
配置
-Electric source: 208V/1Ph/16A -Non-patterned wafer film surface analyzer -One automatic wafer handler -Defect map and histogram with zoom -2D signal integration -Non-contaminating robotic handler -X-Y Coordinates Software -Random access sender/receiver unit
OEM 型号描述
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.
文件
类别
Defect Inspection

上次验证: 60 多天前

物品主要详细信息

状况:

Used


运行状况:

Deinstalled


产品编号:

102947


晶圆尺寸:

6"/150mm


年份:

1998


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

KLA

SURFSCAN 6420

verified-listing-icon
已验证
类别
Defect Inspection
上次验证: 60 多天前
listing-photo-edffe111c7fb4aafb1e1ab06c45f9f8c-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74649/edffe111c7fb4aafb1e1ab06c45f9f8c/dd512456c5f94beba0850fd1de3d1368_64201_mw.png
listing-photo-edffe111c7fb4aafb1e1ab06c45f9f8c-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74649/edffe111c7fb4aafb1e1ab06c45f9f8c/c32559bb31534102bc35ed97e15395e5_64202_mw.png
listing-photo-edffe111c7fb4aafb1e1ab06c45f9f8c-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74649/edffe111c7fb4aafb1e1ab06c45f9f8c/37eebc28360f49328989e8dfa68d0d53_64203_mw.png
物品主要详细信息

状况:

Used


运行状况:

Deinstalled


产品编号:

102947


晶圆尺寸:

6"/150mm


年份:

1998


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
De-installed
配置
-Electric source: 208V/1Ph/16A -Non-patterned wafer film surface analyzer -One automatic wafer handler -Defect map and histogram with zoom -2D signal integration -Non-contaminating robotic handler -X-Y Coordinates Software -Random access sender/receiver unit
OEM 型号描述
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.
文件