说明
KLA 2138 YDD Bright Field Inspection Asset Description PLI0049 Software Version KLA2138 CIM SEC Process DFEC Excluded Items List (Pumps, Chillers & Abatement are all excluded) System Type Description Quantity Main System Main body Handler System STAGE 1 Factory Interface SMIF 2 Others Options System配置
无配置OEM 型号描述
The KLA-2138 is an inline wafer inspection system that uses ultra-broadband technology to detect a wide range of yield-relevant defects on all process layers at high speeds. It features improved brightfield optics, Segmented Auto Threshold technology, and an ultra-broadband illumination source for increased sensitivity and faster setup times. An integrated SMIF minienvironment is also available to streamline automation and reduce fab cleanliness requirements.文件
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KLA
2138
类别
Defect Inspection
上次验证： 26 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
137875
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available