说明
Metrology / inspection system配置
Known issues: Not included: Laser Power Supply; (Qty 5) Optic Parts; Laser Inspection Unit Robot Handler FOUP Factory Interface Process: Darkfield Inspection Software Version: 6.3.24 CIM: SECS/GEMOEM 型号描述
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.文件
无文件
类似上架物品
查看全部
KLA
AIT UV
类别
Defect Inspection
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154796
晶圆尺寸：
12"/300mm
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Metrology / inspection system配置
Known issues: Not included: Laser Power Supply; (Qty 5) Optic Parts; Laser Inspection Unit Robot Handler FOUP Factory Interface Process: Darkfield Inspection Software Version: 6.3.24 CIM: SECS/GEMOEM 型号描述
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.文件
无文件