说明
0.050 um Defect Sensitivity on Polished Bare Silicon • Enhanced Rough Film Sensitivity • Already upgraded with ENH SS laser • Defect Map and Histogram with Zoom • RTDC (Real Time Defect Classification) • Map to Map • Operator Interface • Blower Unit • Software Version: MX4.20.7188 Installed Options: • DBE Enhancement • GEM/SECS [Comm Port] • GEM/SECS [HSMS] • Oblique • XY Coordinates配置
无配置OEM 型号描述
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.文件
无文件
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KLA
SP1 DLS
类别
Defect Inspection
上次验证： 7 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
138242
晶圆尺寸：
未知
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
0.050 um Defect Sensitivity on Polished Bare Silicon • Enhanced Rough Film Sensitivity • Already upgraded with ENH SS laser • Defect Map and Histogram with Zoom • RTDC (Real Time Defect Classification) • Map to Map • Operator Interface • Blower Unit • Software Version: MX4.20.7188 Installed Options: • DBE Enhancement • GEM/SECS [Comm Port] • GEM/SECS [HSMS] • Oblique • XY Coordinates配置
无配置OEM 型号描述
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.文件
无文件