说明
HDD included New laser Unpatterned Wafer Surface Inspection System配置
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEM 型号描述
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.文件
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KLA
SURFSCAN SP2
已验证
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
108659
晶圆尺寸：
未知
年份：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
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KLA
SURFSCAN SP2
类别
Defect Inspection
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
108659
晶圆尺寸：
未知
年份：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
HDD included New laser Unpatterned Wafer Surface Inspection System配置
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEM 型号描述
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.文件
无文件