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说明
Rack of Powersupply is defective – Powersupply is ok Function is ok – not in production Tool on cleanroom floor 1 Palette of spares included: 2x Motion Controller (Newport MM3000) 1x DSP Lock-IN Amplifier 1x Robot Controller (Pri ESC-212) 1x Hot Chuck Temperatur Box (SDI) 1x Controller Activation Box (SDI) 1x Robot (Pri ATM-105-1-S) 1x Voltmeter (PDM-40a) 1x Voltmeter (PDM-60V) 1x Function Generator (Wafertek model 29) 1x Aligner (Brooks PRE-200) 2x Power Supply (Bertan 2341-1) 1x Box misc cable配置
MainframeOEM 型号描述
The SEMILAB FAAST 230 is a non-contact, fast in-line monitoring system designed to detect heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, in a medium to high-volume manufacturing environment. It features automated wafer handling, with options for SMIF/FOUP Loadport/Versaport, and can perform full wafer FAST mapping of diffusion length, Iron, and other recombination centers. The system is configurable for 100 mm to 300 mm wafers and is compatible with other Semilab SDI FAaST tool measurement technologies. Additional options include a minienvironment, wafer edge-grip handling, wafer flipper for automatic backsurface measurement, and more.文件
无文件
SEMILAB
FAAST 230
类别
Defect Inspection
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
113163
晶圆尺寸：
未知
年份：
2001
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Refurbishment Services
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说明
Rack of Powersupply is defective – Powersupply is ok Function is ok – not in production Tool on cleanroom floor 1 Palette of spares included: 2x Motion Controller (Newport MM3000) 1x DSP Lock-IN Amplifier 1x Robot Controller (Pri ESC-212) 1x Hot Chuck Temperatur Box (SDI) 1x Controller Activation Box (SDI) 1x Robot (Pri ATM-105-1-S) 1x Voltmeter (PDM-40a) 1x Voltmeter (PDM-60V) 1x Function Generator (Wafertek model 29) 1x Aligner (Brooks PRE-200) 2x Power Supply (Bertan 2341-1) 1x Box misc cable配置
MainframeOEM 型号描述
The SEMILAB FAAST 230 is a non-contact, fast in-line monitoring system designed to detect heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, in a medium to high-volume manufacturing environment. It features automated wafer handling, with options for SMIF/FOUP Loadport/Versaport, and can perform full wafer FAST mapping of diffusion length, Iron, and other recombination centers. The system is configurable for 100 mm to 300 mm wafers and is compatible with other Semilab SDI FAaST tool measurement technologies. Additional options include a minienvironment, wafer edge-grip handling, wafer flipper for automatic backsurface measurement, and more.文件
无文件